System components:

Chemical supply cabinet/tank → main transfer pipeline → valve box → machine end point of use

Heat tracing/insulation piping, nitrogen purging piping, leak detection circuit, exhaust gas collection piping

Supporting components: filter, pressure regulating valve, flow meter, emergency shut-off valve

Pipe material requirements (semiconductor grade standard)

l High-purity PFA/PTFE tubing: resistant to strong corrosion, low precipitation, no particle shedding, suitable for mainstream pharmaceutical solution delivery.

l SUS316L EP/BA stainless steel tube: electropolished/bright annealed, inner wall roughness Ra≤0.5μm, for gas/ultrapure water use.

l PVDF pipes: resistant to acids and alkalis, and high temperatures; commonly used for wastewater and some chemical treatments.

l Strictly prohibit copper, zinc, and other impurity metals to prevent metal ion contamination of the wafer.

Design Cases: