System Introduction

Specialty gas secondary distribution pipelines (also known as hook-ups) refer to the precision distribution pipelines at the end of the supply chain from the workshop master distribution system (VMB/VMP) to the terminal process equipment (such as etching machines and CVD equipment).

l Ultra-high purity delivery: Guarantee gas purity ≥99.9999% (6N), free from impurities and contamination.

l Precise flow/pressure control: meets the stringent requirements of semiconductor processes where "fluctuations equal yield loss".

l Safety protection: leak prevention, explosion prevention, emergency shut-off (ESD).

l Cleanroom adaptation: Construction is carried out in Class 100/1000 cleanrooms.

Key points for construction and acceptance

l Welding: Fully automated rail argon arc welding (no weld joints, no oxidation)

l Cleaning treatment: degreasing, pickling, passivation, and purging with high-purity nitrogen.

l Detection:

l Helium leak detection: Overall system leakage rate meets standards

l Particle/Moisture Testing: Ensures no impurities are present.

Design Cases