Special Gas Monitoring System (GMS)

System Introduction


As a life support system, the core value of the GMS system lies in:

By monitoring the status of gas supply equipment in real time, and through automated alarms and linkage control, the safety and stability of the special gas supply are ensured, thereby guaranteeing the safety of the semiconductor production environment and the continuous and efficient operation of the manufacturing process.

Advantages

The PLC program uses a mature algorithm. Once deployed, subsequent additions of detectors (GC, VMB) do not require downloading the PLC program again, reducing errors caused by frequent program updates (such as accidental shutdown of the power supply equipment).

The PLC program can be written to 5000 detectors at once, supporting 1000 GC units and 2000 VMB units.

Functional testing can be simulated before going live.

It can guide homeowners on how to easily add detector programs.

Tools used include PLC programming software, drafting software, and BIM.


Design Case Studies

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